Vacuum Magnetron Sputtering Coating Machine
Vacuum Magnetron Sputtering Coating Machine
Vacuum Magnetron Sputtering Coating Machine
Vacuum Magnetron Sputtering Coating Machine

Nqus Magnetron Sputtering Txheej Tshuab

Xa kev nug

Tsham tam sim no

Khoom Taw qhia

Nqus Magnetron Sputtering Txheej Tshuab

Specification

TOB-1100X-SPC-16M magnetron sputtering coater siv cov nyhuv sputtering tsim los ntawm particle bombardment ntawm lub hom phiaj cov khoom nyob rau hauv lub tshuab nqus tsev ib puag ncig, uas ua rau lub hom phiaj cov khoom atoms los yog molecules tua tawm ntawm cov khoom nto, thiab cov txheej txheem ntawm kev tsim ib zaj duab xis nyias yog tso rau ntawm lub substrate. belongs rau lub cev vapor deposition (PVD) kev npaj ntawm nyias zaj duab xis technology. TOB-1100X-SPC-16M magnetron sputter coater tuaj yeem siv rau kev npaj cov qauv tshuaj ntsuam xyuas electron microscope hauv chav kuaj, thiab qhov loj me ntawm cov cuab yeej txuag chaw hauv chav kuaj; kev khiav hauj lwm yog yooj yim thiab haum rau beginners siv.

Nta

Nws yog nruab nrog lub tshuab nqus tsev ntsuas thiab sputtering tam sim no ntsuas, uas tuaj yeem saib xyuas cov xwm txheej ua haujlwm hauv lub sijhawm.
Los ntawm kev kho cov sputtering tam sim no maub los thiab micro nqus pa valve, nws tswj lub tshuab nqus tsev siab, ionization tam sim no thiab xaiv cov roj ionization xav tau kom tau txais cov txiaj ntsig zoo tshaj plaws.
Cov roj hmab sealing nplhaib ntawm ntug ntawm lub tswb vaj tse yog tsim tshwj xeeb los xyuas kom meej tias lub iav tswb vaj tse yuav tsis chipped nyob rau hauv lub sij hawm ntev siv.
Ceramic-sealed high-voltage electrode fittings yog qhov ruaj khov dua li cov roj hmab foob ib txwm siv.
Raws li cov yam ntxwv ionization ntawm cov roj hauv hluav taws xob, lub tshuab nqus tsev loj loj thiab thaj chaw sib thooj ntawm lub hom phiaj sputtering yog siv los ua kom cov txheej txheem sputtered ntau dua qub thiab ntshiab.
Lub taub hau sputter siv Peltier txias thev naus laus zis kom tau txais kev ua haujlwm siab, cov txheej txheem zoo.
Dej-txias sputter taub hau thiab dej-txias cov rooj zaum muaj.

Khoom npe	Nqus Magnetron Sputtering Txheej Tshuab
Yam khoom qauv	TOB-1100X-SPC-16M
Installation condition	Cov cuab yeej no yuav tsum tau siv ntawm qhov siab ntawm 1000m lossis tsawg dua, ntawm qhov kub ntawm 25 degree ± 15 degree thiab av noo ntawm 55% Rh ± 10% Rh. 1. dej: cov cuab yeej yuav tsum tau nruab nrog kev xaiv tus kheej-kho cov dej txias tshuab (sau dej ntshiab lossis dej deionized) 2. hluav taws xob: AC220V 50Hz, yuav tsum muaj qhov zoo hauv av 3. roj: cov khoom siv chamber yuav tsum tau ntim nrog argon (purity 99.99% los yog ntau tshaj), yuav tsum tau muab lawv tus kheej argon gas cylinder (nrog siab txo valve) 4. Lub rooj ua haujlwm: loj 600mm × 600mm × 700mm, load-bearing 50kg lossis ntau dua. 5. Lub tshuab cua tshuab: tsis tas yuav tsum tau
Loj Parameter	1. Lub hom phiaj: Ø50mm
	2. Nqus chamber: Ø160mm × 120mm
	3. nqus tsev kawm ntawv: Tsawg dua los yog sib npaug rau 4 ×10-2mbar
	4, max tam sim no: 50mA (yeem 100mA)
	5. Lub sijhawm txwv tuaj yeem teem sijhawm: 9999s
	6. Micro nqus valve: Txuas Ø3mm hose
	7. txwv voltage: 1600V DC
	8. mechanical twj tso kua mis: 2L / s
	9. Cov khoom siv hom phiaj: Qhov loj me: φ50mm × (0.1-0.5)mm(thickness) Haum rau sputtering Au, Ag, Cu thiab lwm yam hlau (muaj nyob hauv peb lub tuam txhab)
	10. Loj: 360mm × 300mm × 380mm Qhov hnyav tag nrho: 50Kg, Net nyhav: 15Kg