PECVD Rauv

1.Type: 1200 degree Slider-type Dual Zone PECVD System
2.Phase naj npawb: Ib-theem
3. Thermocouple Hom: K hom
4.Model:TOB-DSP-1200 degree -PECVD
5.MOQ: 1set

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1200 degree Slider Hom Dual Zone PECVD System

Specification

Qauv	TOB-DSP-1200 degree -PECVD-I	TOB-DSP-1200 degree -PECVD-II		TOB-DSP-1200 degree -PECVD-III	TOB-DSP-1200 degree -PECVD-IV
Hwj chim	3 KW	3 KW		4 KW	4 KW
Rauv tube loj (mm)	Dia 60 (OD) X 1800 mm	Dia 80 (OD) X 1800 mm		Dia 100 (OD) X 1800 mm	Dia 120 (OD) X 1800 mm
Dimension	1800X410X610	1800X410X610		1800X460X660	1800X460X660
Lub zog hluav taws xob	220V
Phase naj npawb	Ib-theem
Tswj hom	Yudian kub tswj 30 ntu tsuas tuaj yeem siv PID ntsuas kub. FP93 kub tswj (los ntawm Nyiv) (Hloov cov cuab yeej txawv teb chaws, rau tus nqi ntxiv) 1,40 ntu kev tswj qhov kub thiab txias tuaj yeem muab faib ua 4,2,1 pab pawg kev pab cuam, yog tias qhov kev pab cuam muab faib ua plaub pawg, txhua qhov kev pab cuam ntu 10, 2,6 pawg PID tswj, qis, nruab nrab thiab siab kub tuaj yeem ua ke nrog PID txheej, xws li txhua ntu muaj peev xwm tswj tau qhov kub thiab txias yog qhov tseeb heev.
Kub tswj hom	Intelligent PID
Burnout tiv thaiv thiab tso saib	Yog lawm
Kev tiv thaiv kub dhau	Yog lawm
Kev tiv thaiv overcurrent	Yog lawm
Tswj qhov tseeb	+/- 1 degree
Ua rau	Phase-hloov trigger
SCR	106/16E Lub teb chaws Yelemees Simon Kang
1.2 kub max kub	1200 degree
Qhov ntsuas kub 1.2 Rated kub	1150 degree
Cua sov tus nqi	Tsawg dua lossis sib npaug li 30 degree / Min (Muaj raws li kev thov hloov kho)
Pom zoo cua sov tus nqi	Tsawg dua lossis sib npaug li 15 degree / Min
Hom Thermocouple	K hom
Qhov 1.2 kub cheeb tsam cua sov ntev	205 hli
Ib puag ncig qhov kub thiab txias	Tsawg dua lossis sib npaug li 45 degree
Plasma RF zog	Lub zog tso zis ntau yam		0-500W
	Qhov siab tshaj plaws reflected hwj chim		10W
	Teeb liab zaus		13.56MHZ ± 0.005%
	Suab nrov		<30 dB
	Cua txias		txoj kev ua kom txias
	Lub zog nkag		208-240V 50 / 60HZ
GX mov system lub ntsiab tsis	Txheem ntau yam		Proton Flow Controller 5,10,20,30,50,100,200,300,500SCCM, 1,2,3,5,10SLM (koj tuaj yeem xaiv txhua qhov ntsuas)
	Qhov tseeb		± 1.5%
	Siab poob		<0.01MPa
	Rov ua dua		± 0.2% F.S
	Max Kev khiav hauj lwm siab		3 MP
VS -0.1 tso pa tawm	fais fab mov		220V / 380V 380W
	Pump tus nqi		2L / S
	Resistance nqus tsev vacuum		ZDR-I
	Nqus ntsuas ntau yam		0 1-10 5 Pa
	Lub tshuab nqus tsev twj		VRD-8
	Corrugated yeeb nkab		KF 25 X 1000 mm
	Lub tshuab nqus tsev		10 -1Pa